PVD sputtering coating machine
DOI:
https://doi.org/10.46842/ipn.cien.v25n2a03Keywords:
material deposition, PVD, plasma, materials technologyAbstract
This work will address the design of a small-scale machine for sputtering tanks (PVD) for student use. This from the generation and focusing of plasma in a controlled way in a vacuum system with the support of a high voltage system. Through this design it was possible to make a visible aluminum deposit on glass substrates during a simple round of tests. This type of system can open the doors to future projects in materials technology, as well as research in areas such as optics or tribology at the university level.
References
L. A. Pothan, S. Thomas, “Polarity parameters and dynamic mechanical behavior of chemically modified banana fiber reinforced polyester composites,” Composites Science and Technology, vol. 63, no. 9, pp. 1231-1240, Jul. 2003.
K. Hans, “Optical coatings deposited by ion and plasma PVD processes,” Surface and Coatings Technology, vol. 112, no. 1-3, pp. 250-256, 1999, doi: https://doi.org/10.1016/S0257-8972(98)00764-6
K. Bouzakis, “Physical Vapor Deposition (PVD)”, In Chatti S., Tolio T. (eds) CIRP Encyclopedia of Production Engineering. Springer, Berlin, Heidelberg, 2018, doi: https://doi.org/10.1007/978-3-642-35950-7_6489-5
A. Iqbal, N. Sakiba, D. M. Nuruzzamana, “Graphene-based nanocomposites and their fabrication, mechanical properties and applications”, Materialia, vol. 12, 100815, 2020, doi: https://doi.org/10.1016/j.mtla.2020.100815
K. Wasa, Handbook of sputter deposition technology, New Jersey, EEUU, Noyes Publications, 1992.
K. Heon, K. Sang, “Indoor Radon and Lung Cancer: Estimation of Attributable Risk, Disease Burden, and Effects of Mitigation” Yonsei Medical Journal, Nov; vol. 59, no. 9, pp. 1123-1130, 2018, doi: https://doi.org/10.3349/ymj.2018.59.9.1123
A. Baptista, “On the Physical Vapour Deposition (PVD): Evolution of Magnetron Sputtering Process for Industrial Applications”, Procedia Manufacturing, Vol. 17, doi: https://doi.org/10.1016/j.promfg.2018.10.125
Kolzer. Machines. Kolzer. https://kolzer.com/es/maquinas (accesed Dec 10, 2020).
Safematic GmbH. “CCU-010 LV Low Vacuum”. Kolzer. https://www.safematic.ch/ccu-010-lv-sputter-coater-vacuum-coating-system-switzerland.php (accesed Dec 10, 2020).
The Thought Emporium.” Vacuum Sputtering With A Homemade Magnetron”. Hackaday. https://hackaday.com/2019/07/23/vacuum-sputtering-with-a-homemade-magnetron/ (accesed Dec 10, 2020).
Downloads
Published
Issue
Section
License
Copyright (c) 2021 Instituto Politecnico Nacional
This work is licensed under a Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International License.